application area Test gas temperature and pressure Is a MEMS pressure sensor based on silicon piezoresistive effect. The pressure chip is made by silicon micromachining process, the force to be measured acts on the back of the silicon diaphragm, and the reference vacuum is between the front of the silicon diaphragm and the glass substrate. The pressure chip and bonding wire are protected by silica gel. Within the acceptable pressure range, the pressure sensor outputs a voltage signal linearly proportional to the pressure; In a wide temperature range (-40 to +125℃), the sensor circuit provides accurate and stable signal output and temperature compensation, and outputs accurate pressure and temperature values for gas meters.
application area
Test gas temperature and pressure
Is a MEMS pressure sensor based on silicon piezoresistive effect. The pressure chip is made by silicon micromachining process, the force to be measured acts on the back of the silicon diaphragm, and the reference vacuum is between the front of the silicon diaphragm and the glass substrate. The pressure chip and bonding wire are protected by silica gel. Within the acceptable pressure range, the pressure sensor outputs a voltage signal linearly proportional to the pressure; In a wide temperature range (-40 to +125℃), the sensor circuit provides accurate and stable signal output and temperature compensation, and outputs accurate pressure and temperature values for gas meters.
Product performance parameters
50-600KPaA
0.5-2V
Power supply: V
Operating temperature: accuracy:%
application area
Test gas temperature and pressure
Is a MEMS pressure sensor based on silicon piezoresistive effect. The pressure chip is made by silicon micromachining process, the force to be measured acts on the back of the silicon diaphragm, and the reference vacuum is between the front of the silicon diaphragm and the glass substrate. The pressure chip and bonding wire are protected by silica gel. Within the acceptable pressure range, the pressure sensor outputs a voltage signal linearly proportional to the pressure; In a wide temperature range (-40 to +125℃), the sensor circuit provides accurate and stable signal output and temperature compensation, and outputs accurate pressure and temperature values for gas meters.
Product performance parameters
50-600KPaA
0.5-2V
Power supply: V
Operating temperature: accuracy:%